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Wikipedia

• Periodic Table
• Semiconductor
• Depletion Region
• PN Junction
• MOSFET
• Transistor Models
• Photolithography
• Velocity Saturation
• Transistor Count
• Moore's Law

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• Mosfet applet - Applet describing MOSFET operation
• Mosfet applet 2 Another applet treating the MOS transistor as a digital switch rather than an analog device. Also demonstrates the operating principles of basic digital gates.
• Principles of Semiconductor Devices - Web book, by Bart van Zeghbroek at University of Colorado.
• Design of VLSI Systems - Web course by Daniel Mlynek and Yusuf Leblebici at EPFL. The 'links' section at this site contains an excelent set of links.
• Queens University ELEC-853 Course Online learning material for RFIC design. Contains many useful pages also for digital VLSI.

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• How a Microprocessor is Made
• Intel 45nm High-k Metal Gate technology press kit
• Moore's Law (intel site)
• Moore's Law (Intel Press Kit)
• Intel 45nm fab