Wikipedia

• Periodic Table
• Semiconductor
• Depletion Region
• PN Junction
• MOSFET
• Transistor Models
• Photolithography
• Velocity Saturation
• Transistor Count
• Moore's Law

• Mosfet applet - Applet describing MOSFET operation
• Mosfet applet 2 Another applet treating the MOS transistor as a digital switch rather than an analog device. Also demonstrates the operating principles of basic digital gates.
• Principles of Semiconductor Devices - Web book, by Bart van Zeghbroek at University of Colorado.
• Design of VLSI Systems - Web course by Daniel Mlynek and Yusuf Leblebici at EPFL. The 'links' section at this site contains an excelent set of links.
• Queens University ELEC-853 Course Online learning material for RFIC design. Contains many useful pages also for digital VLSI.

• Intel 45nm fab